| 发明名称 |
LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD |
| 摘要 |
A light source apparatus for generating a plasma and supplying a light irradiated from the plasma to an optical system, said light source apparatus includes a chamber for accommodating a region that generates the plasma, wherein a density of a hydrocarbon compound included in a gas in the chamber is 300 ppb or less.
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| 申请公布号 |
US2007023709(A1) |
申请公布日期 |
2007.02.01 |
| 申请号 |
US20060456104 |
申请日期 |
2006.07.07 |
| 申请人 |
KANAZAWA HAJIME;WATANABE YUTAKA;ITO JUN;FUJIMOTO KAZUKI |
发明人 |
KANAZAWA HAJIME;WATANABE YUTAKA;ITO JUN;FUJIMOTO KAZUKI |
| 分类号 |
G01J3/10 |
主分类号 |
G01J3/10 |
| 代理机构 |
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