SEALING METHOD FOR ELECTRONIC DEVICES FORMED ON A COMMON SEMICONDUCTOR SUBSTRATE AND CORRESPONDING CIRCUIT STRUCTURE

摘要

An integrated circuit includes a semiconductor substrate including first and second portions, with first electronic devices adjacent the first portion. Each first electronic device includes a first region comprising at least one first conductive layer projecting from the semiconductor substrate. First protective spacers are adjacent sidewalls of the first regions of the first electronic devices. The first protective spacers are defined by first and second sealing layers adjacent one another. Second electronic devices are adjacent the second portion of the semiconductor substrate. Each second electronic device includes a second region comprising a second conductive layer projecting from the semiconductor substrate. Second protective spacers are adjacent sidewalls of the second regions of the second electronic devices. The second protective spacers are defined by other portions of the second sealing layer. The second sealing layer has a thickness less than a thickness of the first sealing layer.