| 摘要 |
A cooling apparatus of semiconductor manufacturing equipment is provided to prevent the damage of the cooling apparatus itself by stopping the supply of coolant in an ice existent state using an ice detecting unit. A cooling apparatus of semiconductor manufacturing equipment includes a cooling tank, a coolant supply unit and an ice detecting unit. The cooling tank(200) is connected with a chamber. The coolant supply unit is connected with the cooling tank. The ice detecting unit is loaded on the cooling tank in order to detect the existence of ice. The ice detecting unit is composed of a photo coupler and a control part. The photo coupler(310) is used for detecting the existence of ice from the cooling tank. The control unit is used for controlling the operation of the coolant supply unit according to an electric signal of the photo coupler.
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