| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method by which the waviness generated in a glass substrate surface during pre-polishing are removed and the glass substrate is finished so as to have a highly flat surface. <P>SOLUTION: In the method of finishing a pre-polished glass substrate surface, the glass substrate is made of quartz glass containing a dopant and comprising SiO<SB>2</SB>as a main component. The finishing method comprises a step for measuring a concentration distribution of the dopant contained in the glass substrate and a step for measuring a surface shape of the glass substrate in the pre-polished state, wherein conditions for processing the glass substrate surface are set for each part of the glass substrate based on the results from the step for measuring the concentration distribution of the dopant contained in the glass substrate and the step for measuring the surface shape of the glass substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT |
