| 发明名称 |
REFLECTING OPTICAL SYSTEM, ILLUMINATION OPTICAL DEVICE, AND EXPOSURE APPARATUS |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reflecting optical system which can bend an extremely-short ultraviolet ray at a desired angle while suppressing an imbalance of polarization properties of the extremely-short ultraviolet ray and a loss of light intensity. <P>SOLUTION: The reflecting optical system 4 which bends the traveling direction of an extremely-short ultraviolet ray at a predetermined angle includes a first multilayer film mirror 4a into which the extremely-short ultraviolet ray is incident at a predetermined angle, and a second multilayer film mirror 4b into which the extremely-short ultraviolet ray reflected by the first multilayer film mirror 4a is incident at a predetermined angle. The traveling direction of the extremely-short ultraviolet ray incident into the first multilayer film mirror 4a and that of the extremely-short ultraviolet ray reflected by the second multilayer film mirror 4b form an angle θ which is larger than 70° and smaller than 110°. <P>COPYRIGHT: (C)2007,JPO&INPIT |
| 申请公布号 |
JP2007027226(A) |
申请公布日期 |
2007.02.01 |
| 申请号 |
JP20050203876 |
申请日期 |
2005.07.13 |
| 申请人 |
NIKON CORP |
发明人 |
SHIRAISHI MASAYUKI |
| 分类号 |
H01L21/027;G02B5/26;G02B5/28;G02B13/14;G02B13/24;G02B17/00;G03F7/20 |
主分类号 |
H01L21/027 |
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