| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser trimming method with which occurrence of line remainder is avoided when laser-trimming a thin film resistor using a laser beam of plane polarization. <P>SOLUTION: Trimming directions of all laser trimming thin film resistors 10, 11, 12 and 13 in an IC chip 1 are made into one direction, and the trimming direction is arranged in the respective laser trimming thin film resistors 10, 11, 12 and 13. The laser beam of plane polarization is scanned only in the direction where line remainder does not occur so as to trim the laser trimming thin film resistors 10, 11, 12 and 13. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
