| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder with an electrostatic zipper and its manufacturing method. SOLUTION: This substrate holder has a susceptor 450 with an edge projector 451 formed at its margin, and an electrostatic zipper 420 which has been positioned inside the edge projector 451 and above the susceptor 450. The electrostatic zipper 420 and the susceptor 450 are adhered by a gelled adhesive sheet 490 with multiple wires 495 inserted, and a silicon or corrosion-resistant epoxy material is filled up between the edge projector 451 and electrostatic zipper 420. In this way, when the electrostatic zipper 420 and the susceptor 450 are joined, it is possible to maintain an accurate evenness between them and prevent a coolant gas supply hole from being blocked up. COPYRIGHT: (C)2007,JPO&INPIT |
