| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device for plate-shaped workpieces, holding plate-shaped workpieces, such as liquid crystal glass and thin large substrates, in their intended states and suitably performing reception and delivery. SOLUTION: In the transfer device, a plurality of porous units 30 are provided on an upper face of each comb tooth part 14 of a fork. The porous unit 30 is provided with a porous body 51 having an air blowout face 51a opposing to a workpiece and blowing out air through minute holes. In particular, the porous unit 30 has a support body 31 fixed to the comb tooth part 14 and an oscillation main body 41 supported by the support body 31 so as to be oscillated. The porous body 51 is assembled to the oscillation main body 41. When a workpiece is lifted and held by the porous unit 30, the porous unit 30 oscillates in accordance with inclination of the workpiece. COPYRIGHT: (C)2007,JPO&INPIT
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