发明名称 Methods of fabricating silicon carbide crystals
摘要 Methods for producing silicon carbide crystals, seed crystal holders and seed crystal for use in producing silicon carbide crystals and silicon carbide crystals are provided. Silicon carbide crystals are produced by forcing nucleation sites of a silicon carbide seed crystal to a predefined pattern and growing silicon carbide utilizing physical vapor transport (PVT) so as to provide selective preferential growth of silicon carbide corresponding to the predefined pattern. Seed holders and seed crystals are provided for such methods. Silicon carbide crystals having regions of higher and lower defect density are also provided.
申请公布号 US2007022945(A1) 申请公布日期 2007.02.01
申请号 US20060542987 申请日期 2006.10.04
申请人 MUELLER STEPHAN 发明人 MUELLER STEPHAN
分类号 C30B23/00;C30B25/00;C30B28/12;C30B28/14 主分类号 C30B23/00
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