| 发明名称 |
Method and apparatus for inspecting a substrate |
| 摘要 |
A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or segmented detectors are used in a particle beam system.
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| 申请公布号 |
US2007025610(A1) |
申请公布日期 |
2007.02.01 |
| 申请号 |
US20060542822 |
申请日期 |
2006.10.04 |
| 申请人 |
KLA-TENCOR CORPORATION |
发明人 |
ADLER DAVID;BERTSCHE KIRK;MCCORD MARK;FRIEDMAN STUART |
| 分类号 |
G06K9/00;G01N21/956;G01N23/20;G01N23/225;G03F1/00;G03F7/20;H01J37/22;H01J37/28;H01L21/66 |
主分类号 |
G06K9/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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