Control system for helium recovery

摘要

The present invention relates to a gas recycling system that includes a) a source of gas having a predetermined purity; b) an application system that uses the gas and adds contaminants to the gas; c) an adsorption system for removing the contaminants from the gas to produce a purified gas and a waste gas; d) a gas purity analyzer for measuring the amount of the contaminants in the waste gas; and e) conduits connecting the gas source to the application system, and the application system to the adsorption system.