发明名称 Manufacturing method and manufacturing apparatus of field emission display
摘要 A manufacturing method for a field emission display includes the steps of (1) forming a conductive film on a substrate that is to be a base plate, the conductive film being for forming a cathode electrode; (2) applying, on the conductive film, a positive resist, which is a photosensitive material; (3) exposing the positive resist to light, so as to form openings that correspond in a shape of emitters, the light being (a) emitted from a light source, (b) paralleled so that rays thereof have even light intensity distribution, and (c) directed into a micro lens array so as to be condensed in interior of the photosensitive material; and (4) forming the emitters respectively in the openings. This arrangement provides a manufacturing method for a field emission display, the method capable of highly accurately and highly productively sharp emitters aligned orderly, without a complicate manufacturing step and a complicate optical system.
申请公布号 US7169536(B2) 申请公布日期 2007.01.30
申请号 US20030730676 申请日期 2003.12.05
申请人 SHARP KABUSHIKI KAISHA 发明人 NAGASAKA YUKIKO;KITAMURA KAZUYA;TAMURA TOSHIHIRO
分类号 H01J9/02;H01J29/04;H01J31/12 主分类号 H01J9/02
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