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发明名称
Air Flow Control Apparatus for Load Lock Chamber
摘要
申请公布号
KR100676197(B1)
申请公布日期
2007.01.30
申请号
KR20000056380
申请日期
2000.09.26
申请人
发明人
分类号
H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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