发明名称 Method of manufacturing package substrate with fine circuit pattern using anodic oxidation
摘要 Disclosed herein is a method of manufacturing a package substrate with a fine circuit pattern using anodic oxidation. By anodizing a metal core which is opened through a masking process, oxidation layers are formed in open areas of the metal core to insulate portions of circuit pattern from each other. Further, by electroplating portions provided between the oxidation layers with copper or filling conductive paste between the oxidation layers using a screen, a package substrate having a fine circuit pattern is achieved.
申请公布号 US7169707(B2) 申请公布日期 2007.01.30
申请号 US20040011401 申请日期 2004.12.13
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 MAENG DUCK YOUNG;SUN BYUNG KOOK;KIM TAE HOON;MOK JEE SOO;BAE JONG SUK;OH YOONG;SONG CHANG-KYU;CHO SUK-HYEON
分类号 H01L21/302 主分类号 H01L21/302
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