| 摘要 |
A multi-nozzle ink jet head having a diaphragm that effectively utilizes the force generated by thin-film piezoelectric elements is disclosed. The head ( 2 ) has a head substrate ( 28 ) in which are formed a plurality of nozzles ( 39 ) and a plurality of pressure chambers ( 29 ), a multi-layer diaphragm ( 23 - 1, 23 - 2 ), piezoelectric elements ( 27 ), and individual electrodes ( 26 ). By making the thickness of the common electrode layer ( 23 - 1 ) of the multi-layer diaphragm be thin but such that problems do not occur during multi-pin driving, optimization of the rigid layer becomes possible, and hence it is possible to use the force generated by the thin-film piezoelectric elements efficiently in ink ejection.
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