发明名称 Semi-insulating GaN and method of making the same
摘要 Large-area, single crystal semi-insulating gallium nitride that is usefully employed to form substrates for fabricating GaN devices for electronic and/or optoelectronic applications. The large-area, semi-insulating gallium nitride is readily formed by doping the growing gallium nitride material during growth thereof with a deep acceptor dopant species, e.g., Mn, Fe, Co, Ni, Cu, etc., to compensate donor species in the gallium nitride, and impart semi-insulating character to the gallium nitride.
申请公布号 US7170095(B2) 申请公布日期 2007.01.30
申请号 US20030618024 申请日期 2003.07.11
申请人 CREE INC. 发明人 VAUDO ROBERT P.;XU XUEPING;BRANDES GEORGE R.
分类号 H01L29/15;C23C16/24;H01L21/20;H01L21/205;H01L29/20;H01L29/207 主分类号 H01L29/15
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