DATA PROCESSING METHOD OF SEMICONDUCTOR TEST EQUIPMENTS

摘要

A data processing method of a semiconductor test facility is provided to preferentially process data of semiconductor elements, which are inspected in a specific station, when the specific station finishes a test process and then transmits a data processing signal. A data processing method of a semiconductor test facility for testing semiconductor elements in plural stations includes steps of: receiving a signal from the stations(S110); judging whether the signal is a test requiring signal or a data processing signal(S120); executing a test process if for the test requiring signal and stopping the test process of the other station if for the data processing signal(S130,S140,S170); processing and storing data of the semiconductor elements, which are completely inspected in the specific station(S150); executing the test process of the other station again(S160); and performing the test process of the specific station again.