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发明名称
BI-DIRECTION RAPID ACTION ELECTROSTATICALLY ACTUATED MICROVALVE
摘要
申请公布号
CA2616213(A1)
申请公布日期
2007.01.27
申请号
CA20062616213
申请日期
2006.07.26
申请人
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
发明人
SHANNON, MARK A.;MASEL, RICHARD I.;BAE, BYUNGHOON
分类号
B81B3/00;B81B7/02
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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