| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic field measuring device which can select an exposure quantity measurement and a TCO measurement if needed by one set of the device. SOLUTION: The magnetic field measuring device comprises a coil 11 as a magnetic field detection part, an integrator 21 which integrates an output voltage having a differentiation characteristics output from the coil 11 and makes it as a nearly constant amplitude voltage, an operation control means 25 which calculates a characteristic value of the magnetic field to be measured based on the output voltage of the integrator 21, and at least an operation part which gives a predetermined indication to the operation control means 25. The operational control means 25 comprises for example a function to perform a magnetic flux density measuring mode specified by the TCO, a function to perform the exposure quantity measuring mode by a time domain evaluation method, it enables to choose suitably the TCO magnetic flux density measuring mode and the exposure quantity measuring mode from the operation part. COPYRIGHT: (C)2007,JPO&INPIT
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