METHOD AND DEVICE FOR VAPOR GENERATION, VAPOR PROCESSING DEVICE, AND STORAGE MEDIUM FOR VAPOR GENERATION

摘要

PROBLEM TO BE SOLVED: To stably and efficiently generate vapor of a temperature suitable for a processing temperature which contains no liquid component, while shortening the generation time of vapor. SOLUTION: This method comprises an evaporation process for supplying a fluid containing liquid, for example, a fluid obtained by mixing atomized IPA to N2 gas to an evaporation unit 11 of a vapor generator 10 to evaporate the fluid; and a heating-up process for supplying the evaporated fluid to a heating-up unit 12 to heat the evaporated fluid to a predetermined temperature. COPYRIGHT: (C)2007,JPO&INPIT