| 摘要 |
PROBLEM TO BE SOLVED: To provide a plate glass transfer device capable of keeping an air layer on a template in a uniform condition by exhausting air through an air layer relieving part in a lower part of the template smoothly. SOLUTION: This plate glass transfer device is composed of a fan housing provided with a discharge fan 21a in its inside, an air chamber 22 arranged in an upper part of the fan housing and opening its upper face, a base plate 23 attached by adhering closely to an opened upper part of the air chamber 22 and forming a plurality of through holes, and a template part arranged on an upper face of the base plate 23. The template part is provided with a filter holder 52 arranged on each through hole of the base plate 23 and forming a through hole communicating with the through holes of the base plate 23 at the center, a filter 54 arranged in the through hole of the filter holder 52, and the plurality of templates 56 covering an upper face of the filter holder 52, forming an air discharge hole 56a corresponding to the through hole of the filter holder 52, and arranged separated from each other. COPYRIGHT: (C)2007,JPO&INPIT
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