| 摘要 |
PROBLEM TO BE SOLVED: To provide a covered polishing material suitable for use in very fine polishing. SOLUTION: This covered polishing material has a polishing material surface designed to contain a number of formed complexes bonded to a common backing. Each complex has a particle layer of functional powder containing cured resin, and adhering to the abrasive grain dispersed therein and formed polishing material complex to be bonded, and a top upper coating layer is placed on the functional powder particle. As the functional powder, cited are fine abrasive grain, grinding assistant, anti-static additives, lubricant powder and so on. COPYRIGHT: (C)2007,JPO&INPIT
|
