摘要 |
Apparatus and method for transferring a pattern from a template ( 10 ) having a structured surface to a substrate ( 12 ) carrying a surface layer of a radiation polymerisable fluid ( 14 ). The apparatus comprises a first main part ( 101 ) and a second main part ( 102 ) having opposing surfaces ( 104; 105 ), means for adjusting a spacing ( 115 ) between said main parts, support means ( 106 ) for supporting said template and substrate in mutual parallel engagement in said spacing with said structured surface facing said surface layer, a radiation source ( 110 ) devised to emit radiation into said spacing. A cavity ( 115 ) has a first wall comprising a flexible membrane ( 113 ) devised to engage said template or substrate, and means ( 114; 116 ) are provided for applying an adjustable overpressure to a medium present in said cavity, whereby an even distribution of force is obtained over the whole of the contact surface between the substrate and the template.
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