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申请公布号
JP2007501512(A)
申请公布日期
2007.01.25
申请号
JP20060522451
申请日期
2004.07.26
申请人
发明人
分类号
H01L21/331;H01L21/28;H01L29/417;H01L29/732
主分类号
H01L21/331
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