| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a functional film capable of easily peeling the functional film formed on a film forming substrate from the film forming substrate. <P>SOLUTION: The manufacturing method of the functional film comprises a process (a) for forming an electromagnetic wave absorbing layer on a substrate using a material which generates heat by the absorption of an electromagnetic wave, a process (b) for forming a separation layer on the electromagnetic wave absorbing layer using an inorganic material which is decomposed by heating to produce a gas, a process (c) for forming a layer to be peeled, which is formed using a functional material and contains the functional film, on the separation layer, and a process (d) for peeling the layer to be peeled from the substrate by irradiating the electromagnetic wave absorbing layer with an electromagnetic wave or for lowering the joining strength of the layer to be peeled and the substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
