Method for fabricating haze noise standards comprising nano-structures on an insulating thin layer

摘要

The invention relates to a method for the fabrication of Haze noise standards having, respectively, an insulating thin layer ( 102, 202 ) and a plurality of nano-structures ( 114, 116, 214, 216 ) of hemi-spherical form on the insulating thin layer, with the respective standards being fabricationd by: the formation on at least one insulating layer ( 102, 202 ) of seeds ( 106, 107 ) made of a first semi-conductor material by chemical deposition from a first precursor gas ( 104 ) for the first semi-conductor material, formation on the insulating layer ( 102, 202 ) of nano-structures ( 114, 116, 214 ₁ , 214 ₂ , 214 ₃ , 214 ₄) based on a second semi-conductor material and in the form of hemi-spheres, from stable seeds of the first semi-conductor material, by chemical deposition from a second precursor gas ( 110 ) of the second semi-conductor material. The invention also relates to a calibration method using standards obtained by means of such a method.