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发明名称
Wafer-Behandlungsvorrichtung
摘要
申请公布号
DE60032324(D1)
申请公布日期
2007.01.25
申请号
DE20006032324
申请日期
2000.12.22
申请人
ASM INTERNATIONAL N.V.
发明人
SNIJDERS, GERT-JAN;DE RIDDER, CHRISTIANUS GERARDUS MARIA;KUZNETSOV, VLADIMIR IVANOVICH;TERHORST, HERBERT
分类号
H01L21/00;H01L21/26;H01L21/683
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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