| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an electro-optical device in which a two-dimensionally uniform projecting and recessing pattern is formed on a surface of a resin film formed on a substrate, even when the heat capacity on the substrate is nonuniform two dimensionally. <P>SOLUTION: The method for manufacturing the electro-optical device which has TFD elements 21, formed on a substrate 7a and an interlayer insulating film 22, equipped with the projecting and recessing pattern on its surface and formed on the TFD elements 21 is provided. In a step of forming the TFD elements 21, a plurality of regions, composed of regions in which the TFD elements 21 exist on the substrate 7a and regions in which no TFD element 21 exists thereon, with heat capacity different from each other are formed on the substrate 7a. In a step of forming the interlayer insulating film 22, an exposure mask 56A is used, when the projecting and recessing pattern are formed on the surface of the interlayer insulating film 22. The exposure mask 56A is formed, in such a way that a light-shielding pattern 55, placed on regions KO, K1 with higher heat capacity has a larger shape, has lower distribution density, or has a larger shape and lower distribution density, as compared with a light-shielding pattern 55 placed on a region K2 with lower heat capacity. <P>COPYRIGHT: (C)2007,JPO&INPIT |
