PROCESS FOR PRODUCING MEMBER HAVING PATTERN, PATTERN TRANSFER DEVICE AND MOLD

摘要

PROBLEM TO BE SOLVED: To provide a process for producing a member having a pattern in which a protruding or recessed pattern is formed appropriately even in the outer circumferential region of a work, and also to provide a pattern transfer device and a mold. SOLUTION: The pattern transfer device comprises: a first section 155 for holding a first mold 105 which forms a pattern on the inside of the peripheral region of a planar member 103 when the pattern on the mold is transferred to an object to be worked (a workpiece or a wafer); and a second section 158 for holding a second mold 108 which forms a pattern in the peripheral region. COPYRIGHT: (C)2007,JPO&INPIT