| 发明名称 |
New organic bottom antireflective polymer compositions |
| 摘要 |
The present invention relates to bottom antireflective coating compositions, polymers useful in making such compositions, and their use in image processing by forming a thin layer between a reflective substrate and a photoresist coating.
|
| 申请公布号 |
US2007020557(A1) |
申请公布日期 |
2007.01.25 |
| 申请号 |
US20050184593 |
申请日期 |
2005.07.19 |
| 申请人 |
YAO HUIRONG;DING-LEE SHUJI S |
发明人 |
YAO HUIRONG;DING-LEE SHUJI S. |
| 分类号 |
G03C1/00 |
主分类号 |
G03C1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
