| 摘要 |
An automatic in-line sputtering system with an integrated surface corona pretreatment includes a first loading region, a corona processing region, a first unloading/reversible region, a first return region, a transfer region, a second loading region, a pressure-down region, a sputtering region, a pressure-up region, a second unloading/reversible region, and a second return region. The substrate is transported by different carriers in the corona processing region and the sputtering region for the conductive issues, respectively. The carriers are recycled in two corresponding independent internal return regions that make the carriers without having to expose in an open environment. As a result, no fingerprint/dust adheres on the surface of carriers and the pollution of the transport process can be minimized. The system is integrated in a real close and in-line type to achieve the functions of continuous process, automation, cleanness and efficiency.
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