发明名称 |
Glass-like or crystalline optical material`s streaks detecting and/or evaluation method, involves irradiating sample from optical material by light, such that pattern is produced, where sample is provided with immersion medium |
摘要 |
<p>The method involves irradiating a sample (14) from an optical material by the light of a light source (10), such that a pattern is produced for evaluating streaks in the optical material, where the sample is provided with a liquid or gaseous immersion medium in or at a container or tank (13). The immersion medium is selected in such a manner that an angle of incidence of light in the sample material is maximized and/or the reflection and/or polarization of the light are minimized. An independent claim is also included for a device for detecting and/or evaluating streaks in a glass-like or crystalline optical material.</p> |
申请公布号 |
DE102005033013(A1) |
申请公布日期 |
2007.01.25 |
申请号 |
DE20051033013 |
申请日期 |
2005.07.15 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
SPANUTH, JENS;OCHSE, ANDREAS |
分类号 |
G01N21/45;G01M11/00 |
主分类号 |
G01N21/45 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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