发明名称 Glass-like or crystalline optical material`s streaks detecting and/or evaluation method, involves irradiating sample from optical material by light, such that pattern is produced, where sample is provided with immersion medium
摘要 <p>The method involves irradiating a sample (14) from an optical material by the light of a light source (10), such that a pattern is produced for evaluating streaks in the optical material, where the sample is provided with a liquid or gaseous immersion medium in or at a container or tank (13). The immersion medium is selected in such a manner that an angle of incidence of light in the sample material is maximized and/or the reflection and/or polarization of the light are minimized. An independent claim is also included for a device for detecting and/or evaluating streaks in a glass-like or crystalline optical material.</p>
申请公布号 DE102005033013(A1) 申请公布日期 2007.01.25
申请号 DE20051033013 申请日期 2005.07.15
申请人 CARL ZEISS SMT AG 发明人 SPANUTH, JENS;OCHSE, ANDREAS
分类号 G01N21/45;G01M11/00 主分类号 G01N21/45
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