发明名称 |
MIKROMECHANISCHES BAUELEMENT |
摘要 |
A micromechanical component includes a substrate and a movable structure situated on the surface of the substrate. The movable structure is movable parallel to the surface of the substrate. The structure is surrounded by a frame having a cap attached to it. In the area of the movable element, the cap has a stop limiting the movement of the movable element in a direction perpendicular to the surface of the substrate. |
申请公布号 |
DE50111649(D1) |
申请公布日期 |
2007.01.25 |
申请号 |
DE2001511649 |
申请日期 |
2001.07.21 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
KURLE, JUERGEN;WEIBLEN, KURT;PINTER, STEFAN |
分类号 |
G01P15/125;B81B3/00;G01P1/02;G01P9/04;G01P15/08;H01L29/84 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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