| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor chip 1 which can easily manufacture a toroidal inductor 40. SOLUTION: The method has a process of forming a first wiring 12 on the semiconductor chip 1; a process of forming a stress relieving layer 30 so as to cover the first wiring 12; a process of drilling the layer 30 to provide through holes 33, 34, thereby exposing the end of the first wiring 12; and a process of forming a second wiring 22 from the end of the first wiring 12 through the through holes 33, 34 to the surface of the layer 30, thereby forming the toroidal conductor 40 having the first and second wirings 12 and 22 as wirings and the layer 30 as a core 42. COPYRIGHT: (C)2007,JPO&INPIT |
