发明名称 BOARD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a board for manufacturing a semiconductor device which can materialize a simple and reliable manufacturing of a semiconductor device. SOLUTION: The board for manufacturing the semiconductor device 50 comprises a wafer 1 and an adhesive layer 2 formed on the wafer 1. The wafer 1 is formed of a plurality of semiconductor elements 5, a bump 3 arranged in the circumferential part of the semiconductor element 5, and an alignment mark arranged similarly in the circumferential part of the semiconductor element 5. The adhesive layer 2 is formed thicker at a center where the bump 3 is not arranged than the circumferential part where the bump 3 of the respective semiconductor elements 5 is arranged. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007019221(A) 申请公布日期 2007.01.25
申请号 JP20050198494 申请日期 2005.07.07
申请人 SEIKO EPSON CORP 发明人 IMAI HIDEO
分类号 H01L23/12;H01L21/56;H01L21/60 主分类号 H01L23/12
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