| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal flow measuring device capable of reducing fouling of a heating resistor, and reducing a measurement error caused by deterioration with age, without complicating the structure of a circuit or a sensor. <P>SOLUTION: A thin-walled part 7 is formed on a semiconductor substrate 2, and the heating resistor 10 and a part of a thermosensitive resistor 13 are arranged on the thin-walled part 7. The thermosensitive resistor 13, which is a resistance positioned diagonally to the heating resistor 10 in a bridge circuit, is arranged on a position thermally-influenced by the heating resistor 10. Hereby, flow dependency can be imparted to a heating temperature of the heating resistor 10, and the measurement error caused by deterioration with age can be reduced. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
