发明名称 Gate Electrode structures and methods of manufacture
摘要 Gate electrode structures used in field effect transistors and integrated circuits and methods of manufacture are disclosed. Improved work function and threshold modulation are provided by the methods and structures.
申请公布号 US2007018244(A1) 申请公布日期 2007.01.25
申请号 US20050185180 申请日期 2005.07.20
申请人 APPLIED MATERIALS, INC. 发明人 HUNG STEVEN C. H.;MINER GARY E.
分类号 H01L29/76 主分类号 H01L29/76
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