METHODS AND SYSTEMS FOR DETERMINING OPTICAL PROPERTIES USING LOW-COHERENCE INTERFERENCE SIGNALS

摘要

Methods and related systems for determining properties of optical systems (e.g., interferometers) and/or optical elements (e.g., lense and/or lens systems) are described. For example, information related to an optical thickness mismatch of an interferometer (250) can be determined by providing scanning interferometry data. The data typically include obtaining one or more interference signals each corresponding to a different spatial location of a test object (202). A phase is determined for each of multiple frequencies of each test signal. The information related to the optical thickness mismatch is determined based on the phase for each of the multiple frequencies of the interferences signal(s).