发明名称 |
BOARD CLEANING BRUSH, AND BOARD TREATMENT DEVICE USING THE BRUSH, AND BOARD TREATMENT METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a board cleaning brush, and a board treatment device using the same and a board treatment method, wherein a cleaning range can be altered without needing replacement, and cleaning strength is easily set. SOLUTION: The board cleaning brush 10a comprises an end face cleaner 16 including an end face cleaning face 15 abutting on the end face 8 of a board W, and a circumference cleaner 19 which is connected to the end face cleaner 16 and includes a circumference cleaning face 18 abutting on the circumference 9 of the main face 17 of the board W. The circumference cleaner 19 includes a first part 22 having a first circumference cleaning face 21 projecting by a first distance D1 from the end face cleaning face 15, and a second part 24 having a second circumference cleaning face 23 projecting by a second distance D2 differing from the first distance D1 from the end face cleaning face 15. COPYRIGHT: (C)2007,JPO&INPIT
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申请公布号 |
JP2007019213(A) |
申请公布日期 |
2007.01.25 |
申请号 |
JP20050198414 |
申请日期 |
2005.07.07 |
申请人 |
DAINIPPON SCREEN MFG CO LTD |
发明人 |
IWAMI MASAKI;SATO MASANOBU |
分类号 |
H01L21/304;B08B1/00;G02F1/13 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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