| 摘要 |
PROBLEM TO BE SOLVED: To improve waveform resolution in a device for performing spectroscopic analysis of an X-ray generated from a fine domain on a sample such as EPMA, and to enable selection between the waveform resolution and analysis sensitivity corresponding to an analysis purpose or the like. SOLUTION: A solar slit 7 having a variable slit open angle is provided between a multi-capillary X-ray lens 3 for collecting efficiently a characteristic X-ray emitted from the fine domain 2 irradiated with a fine-diameter electron beam on the sample 1 and a plane dispersive crystal 4, and a solar slit 8 having a fixed slit open angle is provided between the plane dispersive crystal 4 and an X-ray detector 6. The waveform resolution and the analysis sensitivity having a trade-off relation are adjusted by selecting the slit open angle of the solar slit 7, and scattered X-rays are removed by the solar slit 8, to thereby improve the waveform resolution. COPYRIGHT: (C)2007,JPO&INPIT
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