| 摘要 |
PROBLEM TO BE SOLVED: To attach a specimen holder fixing a sample ground by an ion beam to a SEM sample base support part without providing an intermediate material used for attaching between the specimen holder and the SEM sample base support part, thereby, reducing the distance between both to arrange the specimen holder proximately to the SEM sample base support part. SOLUTION: The specimen holder 23 directly screwed in a male-screw part 53 provided in the SEM sample base support part is provided with a female-screw hole 52 in a back side of a surface where a sample 3 is ground and observed. The specimen holder fixing the sample is fixed to the direct SEM sample base support part without through the SEM sample base by directly screwing the male-screw part in the female-screw part. COPYRIGHT: (C)2007,JPO&INPIT
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