| 摘要 |
PROBLEM TO BE SOLVED: To improve speed and accuracy of the displacement of a movable part at a low voltage by reducing the difference in timing of changes from ON to OFF and OFF to ON of the movable part. SOLUTION: The micro thin film movable element 100 has a movable part 27 which is elastically supported in a deformable manner and at least a part thereof has a movable electrode 28, and fixed electrodes 35a and 35b arranged facing the movable part 27, and displaces the movable part 27 by electrostatic force corresponding to an electric voltage applied to the movable electrode 28 and the fixed electrodes 35a and 35b, and the micro thin film movable element 100 is provided with a vibration loading means for imposing a vibration on the movable part 27 at least immediately before the moving action. COPYRIGHT: (C)2007,JPO&INPIT |
