| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample support device that facilitates assembling work of a plurality of stages having an electric wire, and prevents the electric wire from disturbing movement of the stages. SOLUTION: The sample support device has a mounting stage 8 superimposed on a base stage 7, and supports a sample S with the mounting stage 8. The base stage 7 and the mounting stage 8 are superimposed on each other while respective coupling faces are faced to each other. The sample support device comprises driving devices 18 and 19 disposed in the mounting stage 8, a mounting-side terminal 31a that is disposed within the coupling face of the mounting stage 8 and is connected to the driving devices 18 and 19 via the electric wires 44, and a base-side terminal 31b that is disposed within the coupling face of the base stage 7 and is electrically connectable to the mounting-side terminal 31a. The mounting-side terminal 31a is electrically connected to the base-side terminal 31b while the mounting stage 8 is superimposed on the base stage 7. COPYRIGHT: (C)2007,JPO&INPIT
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