发明名称 METHOD FOR FORMING A THIN-FILM TRANSISTOR
摘要 A method for forming a thin-film transistor includes forming a source electrode and a drain electrode on an element-side substrate, forming a semiconductor layer in contact with the source electrode and the drain electrode, forming a gate insulating layer overlaid on the semiconductor layer, and forming a gate electrode overlaid on the gate insulating layer, wherein the semiconductor layer is formed over a laser process at the step of forming the semiconductor layer in contact with the source electrode and the drain electrode.
申请公布号 US2007020821(A1) 申请公布日期 2007.01.25
申请号 US20060425159 申请日期 2006.06.20
申请人 SEIKO EPSON CORPORATION 发明人 TOYODA NAOYUKI
分类号 H01L21/84;H01L21/00 主分类号 H01L21/84
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