发明名称 |
Apparatus for separating metal coating film and method for separating metal coating film |
摘要 |
A metal coating removing apparatus ( 1 ) includes a first electrode ( 13 ) arranged so as to be opposed to a metal coating ( 101 ) as an object to be removed, a second electrode 14 arranged so as to be opposed to the metal coating ( 101 ) at a predetermined distance from the first electrode ( 13 ), and a pulse power generator ( 11 ), for example, that functions as a discharge energy supply portion. The pulse power generator ( 11 ) supplies discharge energy between the first electrode ( 13 ) and the second electrode ( 14 ) so as to allow discharging to occur between the first electrode ( 13 ) and the second electrode ( 14 ). By allowing discharging to occur between the first electrode ( 13 ) and the second electrode ( 14 ), the metal coating ( 101 ) can be removed.
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申请公布号 |
US2007018158(A1) |
申请公布日期 |
2007.01.25 |
申请号 |
US20050557289 |
申请日期 |
2005.11.18 |
申请人 |
NAGASHIMA TAKASHI;HISAZUMI TAKAO;AKIYAMA HIDENORI;NAMIHARA TAKAO |
发明人 |
NAGASHIMA TAKASHI;HISAZUMI TAKAO;AKIYAMA HIDENORI;NAMIHARA TAKAO |
分类号 |
B09B5/00;H01L23/58;B01J19/08;B29B17/02 |
主分类号 |
B09B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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