发明名称 Apparatus for separating metal coating film and method for separating metal coating film
摘要 A metal coating removing apparatus ( 1 ) includes a first electrode ( 13 ) arranged so as to be opposed to a metal coating ( 101 ) as an object to be removed, a second electrode 14 arranged so as to be opposed to the metal coating ( 101 ) at a predetermined distance from the first electrode ( 13 ), and a pulse power generator ( 11 ), for example, that functions as a discharge energy supply portion. The pulse power generator ( 11 ) supplies discharge energy between the first electrode ( 13 ) and the second electrode ( 14 ) so as to allow discharging to occur between the first electrode ( 13 ) and the second electrode ( 14 ). By allowing discharging to occur between the first electrode ( 13 ) and the second electrode ( 14 ), the metal coating ( 101 ) can be removed.
申请公布号 US2007018158(A1) 申请公布日期 2007.01.25
申请号 US20050557289 申请日期 2005.11.18
申请人 NAGASHIMA TAKASHI;HISAZUMI TAKAO;AKIYAMA HIDENORI;NAMIHARA TAKAO 发明人 NAGASHIMA TAKASHI;HISAZUMI TAKAO;AKIYAMA HIDENORI;NAMIHARA TAKAO
分类号 B09B5/00;H01L23/58;B01J19/08;B29B17/02 主分类号 B09B5/00
代理机构 代理人
主权项
地址