摘要 |
A semiconductor device includes a back gate electrode composed of a first single-crystal semiconductor layer formed on a first insulating layer, a second insulating layer formed on the first single-crystal semiconductor layer, a second single-crystal semiconductor layer formed on the second insulating layer and having a film thickness smaller than a film thickness of the first single-crystal semiconductor layer, a gate electrode formed on the second single-crystal semiconductor layer, and source and drain layers that are formed on the second single-crystal semiconductor layer and arranged on respective sides of the gate electrode.
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