| 摘要 |
A method and apparatus for depositing a low temperature inorganic film onto large area plastic substrates are described in this invention. Low temperature (<80‹C) inorganic films do not adhere very well to the plastic substrate. Therefore, a low temperature (<80‹C) plasma pre-treatment is added to improve the adhesion property. The inorganic film with plasma pre-treatment shows good adhesion and hermetic properties. ® KIPO & WIPO 2007 |
