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发明名称
Werkstoff mit geringem Volumenwiderstand, Aluminiumnitridsinterkörper und Gegenstand für die Halbleiterherstellung
摘要
申请公布号
DE60125129(D1)
申请公布日期
2007.01.25
申请号
DE20016025129
申请日期
2001.10.23
申请人
NGK INSULATORS LTD.
发明人
KATSUDA, YUJI;YOSHIKAWA, JUN;MASUDA, MASAAKI;IHARA, CHIKASHI
分类号
C04B35/581;H01L21/68;H01L21/683
主分类号
C04B35/581
代理机构
代理人
主权项
地址
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