ANLAGE ZUR BEARBEITUNG VON WAFERN,申请号DE2000513866-传众专利搜索

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发明名称	ANLAGE ZUR BEARBEITUNG VON WAFERN
摘要
申请公布号	DE50013866(D1)	申请公布日期	2007.01.25
申请号	DE2000513866	申请日期	2000.10.24
申请人	INFINEON TECHNOLOGIES AG	发明人	ELGER, JUERGEN
分类号	H01L21/00;H01L21/677;B65G49/07;H01L21/02	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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