ION BEAM AMPEROMETRY MECHANISM USING CYLINDER USING VACUUM PUMPING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an ion milling system capable of simply moving an ion beam gauge head without delay. SOLUTION: The ion beam gauge head is provided in a vacuum chamber. Other vacuum pumping system having a drive part connected with the ion beam gauge head and driven by evacuation is communicated with and provided in the vacuum pumping system communicated with the vacuum chamber. The vacuum pumping system is provided with valves one of which is open when the other is closed and closed when the other is open. COPYRIGHT: (C)2007,JPO&INPIT